TiC薄膜的性能研究  

Growth and Mechanical Properties of TiC Coatings

作　　者：邵霄[1] 朱昌[1] 梁海峰[1] 

机构地区：[1]西安工业大学陕西省薄膜技术重点实验室

出　　处：《真空科学与技术学报》2008年第S1期56-59,共4页Chinese Journal of Vacuum Science and Technology

摘　　要：采用磁过滤直流电弧离子镀法在不同的CH4分压下制备了一系列的TiC薄膜,利用XRD和EDX表征了薄膜的相组成和微结构,用MCMS-1摩擦磨损测试仪,研究了不同CH4分压对薄膜摩擦性能的影响,采用DURAMIN-10型丹麦全自动显微硬度仪,研究不同CH4分压对薄膜硬度的影响。结果表明,不同CH4分压对薄膜的相组成、微结构和力学性能均有明显的影响,高的CH4分压下,薄膜的摩擦系数较低,CH4分压提高到0.15Pa左右,薄膜内形成晶粒细小的单相TiC,进一步提高CH4分压,薄膜呈现非晶态。The TiC coatings were deposited by DC arc ion plating at different partial pressures of CH4 on stainless steel substrates.The microstructures and mechanical properties of the coating were characterized with X-ray diffraction(XRD),energy dispersive spectroscopy(EDS)and conventional mechanical probes.The results show that the CH4 partial pressure strongly affects the mechanical properties of the TiC coating.As the CH4 partial pressure increases,its surface hardness and its wear resistance increase,but its fri...

关 键 词：TiC薄膜 脉冲真空电弧离子镀 微结构 力学性能 

分 类 号：O484.4[理学—固体物理]