碳纳米管在MEMS微电极中的应用研究  

Study on Application of Carbon Nanotubes in Micro-electrodes for MEMS

作　　者：魏星[1] 侯中宇[1] 徐东[1] 张亚非[1] 蔡炳初[1] 

机构地区：[1]上海交通大学微纳科学技术研究院薄膜与微细技术教育部重点实验室微米/纳米加工技术国家级重点实验室,上海200030

出　　处：《微细加工技术》2007年第2期60-64,共5页Microfabrication Technology

摘　　要：采用丝网印刷技术,将配制好的碳纳米管浆料涂敷到金属衬底上,形成碳纳米管薄膜,用四探针仪及表面轮廓仪分别测量了薄膜的方块电阻和表面粗糙度.结果表明,将碳纳米管球磨1 h,以质量比10%～12%与有机溶剂混合配制成浆料,丝网印刷后在真空烘箱内加热至100℃,干燥1 h,最后350℃烧结40 min,所获得的碳纳米管薄膜具有较好的导电性和较平整的表面.根据测量结果,优化了工艺参数,并结合微细加工技术获得了碳纳米管MEMS微电极.Screen printing was used to form carbon nanotube films (CNTF) on the metal substrate after carbon nanotubes were made into slurry liquid, then the surface resistance and the roughness of the films were measured by the four point probe meter and the profile meter, respectively. The results show that the CNTF exhibits a high conductivity and low roughness when it was formed by the procedure of which carbon nanotubes were firstly mixed with organic solvent by the proportion of 10%-12%(wt) carbon nanotubes after they were gone through ball milled for 1 h, and then the formed slurry was coated on the substrate by screen printing to form film and the film was dried in a vacuum oven at 100°C for 1 h, and the film was finally sintered at 350°C for 40 min. According to the results, the technical parameters have been optimized and the micro-electrodes of carbon nanotubes for MEMS were fabricated by the micro-fabrication technology.

关 键 词：碳纳米管 薄膜 丝网印刷 微电极 MEMS 

分 类 号：TN304.1+8[电子电信—物理电子学]