光刻机试验运动装置振动信号的时频分析  

Time and Frequency Analysis of Vibration Signals for Testing Motion Equipment of Lithography

作　　者：邓习树[1] 吴运新[1] 隆志力[1] 杨辅强[1] 

机构地区：[1]中南大学机电工程学院,长沙410083

出　　处：《微细加工技术》2007年第5期18-21,共4页Microfabrication Technology

基　　金：国家自然科学基金委项目重大项目课题资助;上海市科委联合资助项目<精密机械减振隔振技术研究>(50390064)

摘　　要：步进扫描光刻机在工作状态下振动特性的好坏对其性能起着重要作用。为给步进扫描光刻机的设计研究提供理论指导,设计了一种步进扫描光刻机模拟试验运动装置,它能够完全再现步进扫描光刻机的运动特点。在此基础上,对试验装置的关键部件进行了振动测试,运用傅里叶变换和现代联合时频分析技术对测得的数据分别进行了分析,结果表明,采用联合时频分析技术更能反映系统的固有性质和振动特性,所得到的参数和结果对指导步进扫描光刻机隔振装置的设计具有一定的实际意义。The development of lithography machines decides the development of semiconductor manufacturing technology.The stepping scanning lithography machine is widely used in the world and its vibration state plays an important role for the performance of the lithography when it works.To provide theoretical guide for the design of stepping and scanning lithography,a simulated testing motion equipment of the Stepping Scanning Lithography was designed,which it can completely realize the motion characteristics of the industrial lithography.On the bases,the vibration of some key parts was tested and Fourier transform and joint time-frequency analysis technology are applied to analyze the tested data.The results indicate that the joint time-frequency analysis technology is suitable for testing the intrinsic properties and vibration characteristic of the lithography and they can provide definite instruction for design of the vibration isolation device of the stepping scanning lithography.

关 键 词：光刻机 模拟装置 振动 时频分析 

分 类 号：TH161+.6[机械工程—机械制造及自动化]