(110)硅基MEMS光开关光纤定位槽的设计  

Design of the Fibers Coupling Grooves for MEMS Optical Switch on(110) Silicon

作　　者：贾翠萍[1] 董玮[1] 周敬然[1] 王丹[1] 臧会东 徐宝琨[1] 陈维友[1] 

机构地区：[1]吉林大学电子科学与工程学院集成光电子国家重点实验室,长春130012

出　　处：《微细加工技术》2006年第2期45-48,共4页Microfabrication Technology

基　　金：国家863计划资助项目(2002AA312023)

摘　　要：利用KOH溶液腐蚀在(110)硅片上制作2×2 MEMS光开关,微反射镜表面光滑且垂直度较好,其质量高于用同样方法在(100)硅片上制作的反射镜,但是却存在自对准V型槽难以实现的问题。依据(110)硅片的结晶学特点,设计并制作了夹角为38.94°的两个光纤定位槽:一个为U型槽,两侧面均为{111}面;另一个是呈锯齿状的光纤槽,它是由腐蚀出的平行四边形蚀坑串组成。介绍了锯齿状沟槽的实现原理,对平行四边形蚀坑尺寸进行了分析设计,并采用菱形凸角补偿结构实现凸角补偿。这两种光纤定位槽结构都能够很好地固定光纤,并实现了光纤的自对准,且制作方法简单。2 × 2MEMS optical switch was fabricated by etching (110) silicon in aqueous KOH solution. Micromirror has smooth surface and good verticality, but it is difficult to realize self-align V-grooves. According to crystallography characteristics, two grooves with an angle of 38.94° were designed and fabricated: One is U-groove with {111} sidewalls, the other is dentate groove, which is composed of a series of etched parallelogram pits. Principle of the dentate groove was introduced, and rhombic patterns were used to compensate for undercut on convex corners of the dentate groove. Fibers can be fixed well and self-aligned in both grooves. It is an easy way to solve the problem of fabricating accurate, self-align grooves for fibers on (110) silicon.

关 键 词：光开关 (110)硅片 耦合 锯齿状沟槽 

分 类 号：TN25[电子电信—物理电子学]