基于SU-8胶的微针执行器的研制  

Research of Microneedle Actuator Based on SU-8 Photoresist

作　　者：秦宁[1] 赵湛[1] 张博军[1] 陈绍凤[1] 夏善红[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室

出　　处：《仪器仪表学报》2004年第z3期104-106,共3页Chinese Journal of Scientific Instrument

基　　金：863计划资助项目(2002AA404230)。

摘　　要：利用MEMS技术设计和制作了一种微量取样执行器。执行器由微针、微通道、反应室、电极以及永磁微阵列等各部分组成,通过外部磁场可以实现双向线性地驱动。利用SU - 8光刻胶为主要材料,采用多级曝光和电铸金属实现3D结构的工艺技术,研制出了微针执行器的雏形器件。针尖的尺寸为5 0 0 μm×6 0 μm×6 0 μm,针孔截面为2 0 μm×2 0 μm。A micro sampling actuator driven by electromagnetic force is designed and fabricated by MEMS technology. It is composed of microneedle, microchannal, reaction chamber, and permanet magnet array, and it can be driven bidirectionally and linearly by the magnetic field outside. The rudiments of microneedle actuator have been developed, which is mainly made of SU 8 photoresist, and its 3D construction is fabricated by multistep exposal and electroforming metal. The size of microneedle is 500μm×60μm×60μm,and its aperture section is 20μm×20μm.

关 键 词：SI-8胶 微针执行器 MEMS 

分 类 号：TH7-55[机械工程—仪器科学与技术]