毛细管电泳芯片制备工艺研究  

Study of microfabrication of capillary electrophoresis chip

作　　者：杨承[1] 黄成军[1] 刘锋[1] 于军[1] 

机构地区：[1]华中科技大学电子科学与技术系,湖北武汉430074

出　　处：《华中科技大学学报（自然科学版）》2004年第7期92-94,共3页Journal of Huazhong University of Science and Technology(Natural Science Edition)

基　　金：武汉市科委资助项目 (2 0 0 1 6 0 0 91 0 7)

摘　　要：叙述了采用SU 8和PDMS制作毛细管电泳芯片的一种新工艺、新方法 ,对SU 8的四个工艺参数 :前烘温度与时间、后烘温度与时间、曝光时间以及显影时间进行了工艺优化 ,结果表明使用该方法加工工艺简单 ,芯片重复性好 ,成本低 ,适用于采用激光诱导荧光检测法进行检测 。The application of SU 8 photo resist and polydimethylsiloxane (PDMS) to capillary electrophoresis chip (CE Chip) was presented. The parameters including soft bake temperature and time, post exposure bake temperature and time, exposure time and developing time were optimized. It was shown that the technique was simple in processing; the CE chip had low cost and was good for the laser induced fluorescence detection. The different DNA fragments can be separated in the chip.

关 键 词：毛细管电泳芯片 SU-8光刻胶 光刻 

分 类 号：TN405[电子电信—微电子学与固体电子学]