磁悬浮微进给机构电磁场研究  

Research on electromagnetic field of magnetic levitation precise feeding device

作　　者：杨秀华[1] 王延风[1] 卢志山[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所

出　　处：《电光与控制》2004年第3期23-25,共3页Electronics Optics & Control

摘　　要：　针对微电子行业IC芯片制造设备如光刻机而设计了磁悬浮微进给机构,并对它进行了电磁场耦合分析及解耦控制,准确综合地研究磁悬浮系统。在不计漏磁的简单磁路、磁力计算基础上,采用有限元分析软件ANSYS对电磁场进行有限元分析,得到考虑漏磁的磁场分布及准确的磁力计算结果,从而确定电流及气隙大小等悬浮控制参数,为控制设计与试验提供了参考。A precise feeding device with magnetic levitation was designed for chip manafacturing equipment, such as optical engravers. An integrated study was carried out on the magnetic levitation system by taking electromagnetic coupling and uncoupling control of it. Finite element analysis was performed for the electromagnetic field with finite element analysis software of ANSYS, and typical parameters of interest in magnetic analysis were obtained such as magnetic flux density, magnetic field intensity, magnetic forces and flux leakage etc., which supplied a reference for future use.

关 键 词：CAD/CAE 磁悬浮 直线电机 光刻机 有限元法 

分 类 号：TP391.72[自动化与计算机技术—计算机应用技术] TM15[自动化与计算机技术—计算机科学与技术]