亚微米级液压式微驱动器工作机理及其特性  

Mechanism and Characteristics of Sub-Micron Hydraulic Micro-Actuator

作　　者：王树林[1] 张兵[1] 沈春根[1] 陈兴华[1] 刘刚 

机构地区：[1]江苏大学机械工程学院,镇江212013 [2]机械工业高速精密工具工程技术研究中心,上海200093

出　　处：《纳米技术与精密工程》2009年第5期408-412,共5页Nanotechnology and Precision Engineering

基　　金：国家科技支撑计划资助项目(2008BAF32B06);国家自然科学基金资助项目(50675088)

摘　　要：为了提高精密机床的加工精度,研究了一种新型的液压式微位移驱动器.用有限元方法分析了缸体内部径向压力对液压式微驱动器输出微位移的影响,得到了驱动器结构设计公式,并讨论了其适用范围.建立了液压式微位移驱动器性能测试系统,对其主要性能进行了研究.研究结果表明,该微驱动器具有输出与输入线性度好(相关系数达到0.999 97)、刚度高(1.0×109N/m)、稳定性好和无滞后等优点.该微驱动器分辨力达到0.01μm,能够实现亚微米级进给,在精密加工和精密测量中具有广阔的应用前景.To improve the machining accuracy of precision machine tools,a new type of hydraulic micro-actuator was studied.The influence of radial pressure in the cylinder on micro-displacement of the hydraulic micro-actuator was analyzed by finite element analysis.A simplified design formula for its structural design was put forward and the condition of its application was discussed.Furthermore,the experimental system for performance test of the hydraulic micro-actuator was set up and its main characteristics were studied.The result shows that this micro-actuator has many advantages such as high linearity(correlation coefficient 0.999 97),high stiffness(1.0×109 N/m),good stability and no hysteresis etc.The resolution of this micro-actuator is 0.01 μm and the sub-micron feed can be achieved.The hydraulic micro-actuator can be widely applied to precision machining and precision measuring.

关 键 词：液压 微位移驱动器 线性 刚度 滞后性 

分 类 号：TH703.8[机械工程—仪器科学与技术]