压电直线电机驱动的精密工件台研制及应用  

Precision Stage Driven by Piezoelectric Linear Motor and Its Application

作　　者：刘俊标[1] 殷伯华[1] 文良栋[1,2] 方光荣[1] 韩立[1] 

机构地区：[1]中国科学院电工研究所,北京100190 [2]中国科学院大学,北京100049

出　　处：《振动．测试与诊断》2013年第S2期52-54,218,共4页Journal of Vibration,Measurement & Diagnosis

基　　金：国家自然科学基金资助项目(51375470)

摘　　要：为了满足在毫米量级范围内以低成本的电子束直写技术制作纳米器件和微纳米结构的需求,提出了一种基于压电陶瓷直线电机驱动的高精度二维精密工件台设计结构。该精密工件台采用精密交叉滚柱导轨,共有3层结构,采用20nm测量分辨率的光栅尺建立了测量系统,具有结构简单、步进精度高、定位速度快、能够在真空中运行且不产生干扰磁场等优点。利用该精密工件台在普通扫描电镜平台上构建了科研型的小型电子束曝光系统。实验结果表明,该精密工件台在某型号SEM中的拼接精度为21nm(x方向)和63nm(y方向),并且制作了一些纳米点阵和纳米电极等结构。A precision stage drove by piezoelectric linear motors is designed for nano-devices and micro&nano structures fabricated by e-beam direct-write lithography in a square millimeter area with low cost.The stage guided by precision cross roller guide has three layer structure and linear encoders with 20nm resolution are used for its measurement system,and it can operate in the vacuum environment without magnetic interference.Based on a SEM,a simple e-beam direct-write lithography system is upgraded with the stage.The experiments show that the lithography system can achieved pitching precision is 20nm(x direction)and 72.1(x direction)and can make some micro&nano structures.

关 键 词：电子束直写技术 压电直线电机 精密工件台 光栅测量 

分 类 号：TM359.4[电气工程—电机]