以ZnS为源用化学气相沉积法在硅衬底上生长ZnO纳米颗粒  

SYNTHESIS OF ZnO NANO-PARTICLES ON Si SUBSTRATES BY CVD METHOD WITH ZnS AS THE SOURCE

作　　者：李宇杰[1] 石鹏博[1] 段然[1] 张伯蕊[1] 乔永平[1] 秦国刚[1] 黄兰[2] 

机构地区：[1]北京大学物理学院介观物理国家重点实验室,北京100871 [2]北京大学化学学院,北京100871

出　　处：《红外与毫米波学报》2004年第3期176-180,共5页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金重点项目 ( 90 2 0 10 3 7)

摘　　要：首次以ZnS为源 ,采用化学气相沉积法在抛光的Si单晶片衬底上生长晶态的ZnO纳米颗粒 ,其形貌、尺寸和密度都与气体流量、衬底温度、生长时间以及有无催化剂等生长条件密切相关 .在没有Au催化的条件下 ,ZnO颗粒呈圆形颗粒 ,直径多在 30 2 0 0nm之间 ,密度为 10 4— 10 9cm-2 ;有Au催化的条件下 ,ZnO纳米颗粒呈六边形 ,平均尺寸明显变小 ,在 10 10 0cm之间 ,而密度显著提高 ,为 10 8— 10 10 cm-2 .所制备的纳米ZnO颗粒在 4 97nm和Crystalline ZnO nano-particles were synthesized on Si substrate with and without An catalyst through chemical vapor deposition(CVD) method with ZnS as the source material for the first time. The growth morphology of ZnO particles is strongly affected by the flow rate, the temperature of the Si substrate and the catalyst. Without Au catalyst, the nano-particles are round in shape with the average sizes in the range of 30-200nm and the density of 10(4)-10(9) cm(-2). In the presence of Au catalyst, ZnO particles grow into hexagonal shape. The average particle sizes are smaller, in the range of 10-100nm, while the particle density becomes larger, in the order of 10(8)-10(10) cm(-2), than those of the ZnO particles grown without An. Strong and relatively weak photoluminescence peaks around 497nm and 376nm are found for the as-synthesized ZnO nanoparticles.

关 键 词：化学气相沉积法 硫化锌 光致发光 凝聚态物理 氧化锌纳米颗粒 

分 类 号：TB383[一般工业技术—材料科学与工程] O482.31[理学—固体物理]