厚度偏差对VCSEL的反射谱和反射相移的影响  

Effect of Thickness Deviation on the Reflection Spectra and Phase Shift of VCSELs

作　　者：侯识华[1] 赵鼎[2] 孙永伟[1] 杨国华[1] 谭满清[1] 陈良惠[1] 

机构地区：[1]中国科学院半导体研究所,北京100083 [2]中国科学院电子学研究所,北京100080

出　　处：《光学与光电技术》2004年第4期31-33,共3页Optics & Optoelectronic Technology

基　　金：国家863计划资助(项目编号2001AA312180)

摘　　要：采用光学传输矩阵方法分析了厚度偏差对VCSEL的反射谱和反射相移产生的影响。结果表明,反射镜和VCSEL中各层厚度的偏大,将使反射镜的中心波长以及VCSEL的模式波长向长波方向移动,而反射镜和VCSEL中各层厚度的偏小,将使反射镜的中心波长以及VCSEL的模式波长向短波方向移动。将键合界面离有源区稍微远一些,有利于减小其厚度偏差对VCSEL的模式波长的影响。The effect of thickness deviation on the reflection spectra and phase shift of VCSELs has been analysed using optical transfer matrix method. The result shows that a positive thickness bias in DBR and VCSEL result in a shifting of the center wavelength of the DBR and the mode wavelength of the VCSEL toward long wavelength, while a negative thickness bias in DBR and VCSEL lead to a blue shifting of both the center wavelength of the DBR and the mode wavelength of the VCSEL. In addition, it is beneficial to reduce the effect of thickness deviation on the shifting of the mode wavelength of VCSELs to put the fused interface a little far away from the active region.

关 键 词：厚度偏差 垂直腔面发射激光器 晶片键合 反射谱 反射相移 

分 类 号：TN248.4[电子电信—物理电子学]