激光调阻工艺参数对调阻精度的影响分析  

The Analysis of Laser Trimming Resistance Technical Parameters' Effect on the Resistance Value Precision

作　　者：孙继凤[1] 汤建华[1] 郭晓光[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,长春130033

出　　处：《应用激光》2004年第3期139-141,共3页Applied Laser

摘　　要：激光调阻的工艺参数主要包括光斑重叠率、激光功率、调Q频率和调阻速度 ,它们选择的合适与否直接影响激光调阻精度 ,如何确定激光调阻工艺参数是激光调阻控制中的重要问题。文中从理论分析和实验数据分析两个方面研究了激光调阻工艺参数对激光调阻精度的影响 ,并给出了激光调阻工艺参数之间的函数关系式和实际应用 ,为激光调阻工艺参数的选择提供了必要依据。The main laser trimming resistance technical parameters include laser beam overlap ratio,laser power,Q-frequency and trimming speed. They directly affect the laser trimming resistance value precision so that how to select these parameters is very important. The paper describes the laser trimming technical parameter's effect on the laser trimming resistance value precision in two aspects of theory analysis and experiment data analysis. The laser beam overlap ratio,laser power,Q-frequency and trimming speed are not respective and the relation among these technical parameters is given. You can select suitable parameters on the base of contents in the paper for your need and application.

关 键 词：激光调阻 调阻精度 光斑重叠率 激光功率 调Q频率 调阻速度 

分 类 号：TM54[电气工程—电器] TN249[电子电信—物理电子学]