微执行器中连续电磁驱动的数学模型  

Mathematic Model for Electromagnetic Continuous Actuating of Micro Actuators

作　　者：吴茂松[1] 杨春生[1] 茅昕辉[1] 赵小林[1] 蔡炳初[1] 

机构地区：[1]上海交通大学微纳米科学技术研究院信息存储研究中心,上海200030

出　　处：《压电与声光》2004年第4期337-340,共4页Piezoelectrics & Acoustooptics

摘　　要：为了指导电磁微执行器的设计与开发研究,该文用解析法求出了微执行器中电磁连续驱动的数学模型,分析了衔铁位移与励磁电流的关系曲线及其各部分的物理意义,揭示了该曲线在铁心相对磁导率变化小或影响小的情况下存在极大值和失稳现象的规律:当衔铁的位移使磁路总磁阻减小1/3时,所需励磁电流最大,继续减小磁路磁阻时,则发生失稳现象。分析结果与实验结果相吻合。In order to direct the design and development of electromagnetic micro actuators, Mathematic Model for Electromagnetic Continuous Actuating of Micro actuators is researched by means of analytical method in this paper. The curve of relations between displacement of armature and exciting current and the physical meaning of different parts of the curve are studied and analyzed. It is revealed that, when the relative permeability of the core is nearly unchanged or the influence of the change is tiny during the continuous actuating, there are a peak of the curve where the whole reluctance reduces by a third because of the displacement of the armature, and a destabilization phenomenon after the peak. Some typical conditions are discussed. The results of the analysis accord well with experimental results.

关 键 词：微机电系统 电磁微执行器 电感器 电磁连续驱动 

分 类 号：TM153[电气工程—电工理论与新技术]