镍表面三维微图形的复制加工  

Chemical Microetching of Three-dimensional Gear-like Pattern on Nickel Surface

作　　者：刘柱方[1] 蒋利民[1] 汤儆[1] 张力[1] 田中群[1] 田昭武[1] 刘品宽[2] 孙立宁[2] 

机构地区：[1]厦门大学化学系固体表面物理化学国家重点实验室，福建厦门361005 [2]哈尔滨工业大学机器人研究所，黑龙江哈尔滨150001

出　　处：《电化学》2004年第3期249-253,共5页Journal of Electrochemistry

基　　金：科技部 863计划项目 (2 0 0 2AA40 41 70 )资助

摘　　要：　运用约束刻蚀剂层技术(CELT)在金属镍(Ni)表面实现三维微图形加工,以规整的三维齿状微结构作模板,获得可有效CELT加工的化学刻蚀和捕捉体系,在Ni表面得到了与齿状结构互补的三维微结构并应用扫描电子显微镜(SEM)和原子力显微镜(AFM)表征刻蚀图案,证实CELT可用于金属表面Ni的三维微图形刻蚀加工.The chemical micromachining on nickel surface with three-dimensional (3D) gear-like mold was realized by confined etchant layer technique (CELT). By using effective chemical etching and scavenging system (HNO_(3) + NaOH) and optimizing experimental parameters, such as the etching time, etching current density, concentration of the etchant or and scavenger, we obtained the etched pattern, which is close to negative copy of the mold. The etched micro-pattern characterized by SEM and AFM, demonstrates that CELT can be applied to the 3-D microstructure replication on nickel surface .

关 键 词：镍 三维微图形 复制加工 约束刻蚀剂层技术 化学刻蚀 捕捉体系 微系统技术 

分 类 号：TG176[金属学及工艺—金属表面处理]