三柱靶磁控溅射镀膜机在工艺品装饰镀中的应用  

Application of magnetron sputtering plant with three cylindrical targets to decoration coating

作　　者：马胜歌 康光宇[1] 耿漫[1] 

机构地区：[1]深圳国家计划材料表面工程技术研究开发中心,广东深圳518029

出　　处：《真空》2004年第5期42-44,共3页Vacuum

摘　　要：将三柱靶磁控溅射镀膜机应用于工艺品装饰镀生产中,开发多种镀膜工艺并进行了批量生产,实践证明:三柱靶磁控溅射镀膜技术结合特制的衬底漆和保护面漆涂装工艺,能够在工艺品上获得合格的装饰层。拓展该技术在工艺品行业的应用,可有效减轻传统电镀对环境的污染。Various film coating processes were developed for production of different decorations in batches by use of a magnetron sputtering plant with 3 cylindrical targets. The results showed that qualified decorative coatings are obtained using the processes in combination with special primers and protective paints applied to surface. Extending the application of the film coating processes can effectively reduce the pollution due to traditional electrolyte plating process.

关 键 词：磁控溅射 圆柱靶 装饰镀 工艺品 

分 类 号：TB43[一般工业技术]