薄孔壁厚和小孔径测量系统  

Measurement System of Thin Wall Thickness and Apertures of Two Adjacent Holes

作　　者：李斐[1] 郭辉[1] 孙长库[1] 郑义忠[1] 张以谟[1] 

机构地区：[1]天津大学精密测试技术与仪器国家重点实验室,天津300072

出　　处：《天津大学学报（自然科学与工程技术版）》2004年第10期914-917,共4页Journal of Tianjin University：Science and Technology

摘　　要：由于相邻孔壁厚度的测量根据进刀量进行计算时精度很低,故提出了一种应用电容传感器对2个微小孔间相邻孔壁进行精密测量的系统.基于非接触式电容测孔传感器,研究了测头的电场边缘效应影响及保护环的宽度选择,设计了电容瞄准测孔传感器的测头对相邻小孔中心定位,利用电容差动测厚传感器测量孔壁.系统由1个瞄准测孔传感器和2个差动测厚传感器及三通道测量电路组成,处理数据后直接显示孔径和孔间壁厚.系统属非接触测量,无需修正测头及工件变形误差.实验证明,测量精度为0.5μm.The wall thickness measurement of two adjacent small holes,which used to be calculated by feed (amount,)is an intractable problem for low precision.A measurement system with capacitance sensors is presented in this paper.Based on non-contact capacitance sensor,the influence of edge effect and choices of protecting ring width are studied.The gauge head of capacitance sensor is designed to center holes,and two differential capacitance sensors are introduced to measure the wall thickness of two small holes.The system,composed of one alignment sensor,two differential thickness sensors and one three-channel measuring circuit,can display not only diameters of through or blind holes, but also wall thickness between them.Being non-contact measurement,the system dispenses with distortion error compensations of gauge head or workpiece.The measurement accuracy is proved to be 0.5 μm by experiment.

关 键 词：电容传感器 非接触测量 孔径 孔壁 

分 类 号：TH89[机械工程—仪器科学与技术]