钛酸锶钡(BST)薄膜的介电性能研究  

Study on dielectric properties of barium strontium titanate thin films

作　　者：陈宏伟[1] 杨传仁[1] 符春林[1] 赵莉[1] 高志强[1] 

机构地区：[1]电子科技大学微电子与固体电子学院,四川成都610054

出　　处：《功能材料》2004年第5期615-617,共3页Journal of Functional Materials

基　　金：国家重点基础研究发展计划(973计划)资助项目(Z01)

摘　　要：　采用射频磁控溅射法制备了BaxSr1-xTiO3(简称BST)薄膜材料,研究了不同膜厚、晶粒尺寸的BST薄膜的介电系数温度特性(εr T)、频率特性(εr f)、电压特性(εr U)及损耗的温度特性(tgδ T)、频率特性(tgδ f),找出了BST薄膜的非线性、损耗随尺度变化的规律。Barium strontium titanate (BST) thin films were prepared by RF magnetron sputtering. The characteristics of permittivity-temperature, permittivity-frequency, permittivity-bias, loss-temperature and loss-frequency of BST thin films with different thicknesses and grain sizes were investigated. The relationships between the dielectric nonlinearity, dissipation factor and dimensions were found.

关 键 词：钛酸锶钡 薄膜 膜厚 晶粒尺寸 介电性能 

分 类 号：TN384[电子电信—物理电子学]