利用曲面计算全息图进行凸面非球面检测  

Testing the Convex Aspheric Surface by Using CGH on Curved Surface

作　　者：卢振武[1] 李凤有[1] 刘华[1] 谢永军[1] 翁志成[1] 

机构地区：[1]中科院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130022

出　　处：《光电子．激光》2004年第9期1088-1090,共3页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金资助项目(60078006)

摘　　要：基于曲面计算全息方法,设计了检测大口径凸面非球面的干涉仪,其精度可优于λ/30(P V值)。研究了利用激光直写设备在曲面基底上制作全息图的方法,由于全息图的线宽变化较大,采用刻线的两边精确写入、中间螺旋线写入快速填充的策略,有效提高了写入精度和效率。在口径110mm、曲率半径500mm的曲面基底上,制作出了全息元件。利用自制的干涉装置,对用金刚石车床车削成的、口径100mm的凸面非球面进行了检测,非球面的精度为0.8λ(P V值),检测结果与车床的精度吻合很好。Computer generated hologram (CGH) fabricated in concaved surface has been proven to be good method for interferometric measurement of convex aspheric surfaces. We have successfully designed and fabricated a convex aspheres testing system and its testing accuracy is better than λ/30. We fabricated a large curved CGH on the concave substrate with diameter of 110 mm and radius of curvature of 500 mm. To fabricate the hologram precisely and efficiently, we adopt single pass to write two brims of every zone and adopt screw-lines to fill in the blank between these two brims. Using the CGH fabricated by laser direct writing system, a convex aspheric surface produced by diamond-turning with 100 mm in diameter was tested. The testing result shows that the surface error is 0.8 λ P-V, and it agrees well with the accuracy of diamond turning machine.

关 键 词：非球面检测 计算全息图 线宽 激光直写 元件 螺旋线 口径 曲面 全息元 基底 

分 类 号：TN247[电子电信—物理电子学] O438[机械工程—光学工程]