多弧镀及磁过滤阴极弧沉积TiN薄膜的摩擦学性能对比  

Comparative Study on the Tribological Properties of TiN Films Prepared by Multi Arc Ion Plating and Filtered Cathodic Arc Plasma Deposition

作　　者：张玉娟[1] 吴志国[2] 张伟伟[2] 阎鹏勋[2] 刘维民[1] 薛群基[1] 

机构地区：[1]中科院兰州化学物理研究所固体润滑国家重点实验室,甘肃兰州730000 [2]兰州大学等离子体与金属材料研究所,甘肃兰州730000

出　　处：《摩擦学学报》2004年第6期498-502,共5页Tribology

基　　金：国家自然科学基金资助项目(10074022).

摘　　要：分别采用多弧离子镀(MAIP)和带有平面"S"形过滤管的磁过滤阴极弧设备(FCAP)在不锈钢基底上制备了2种TiN薄膜;采用往复式球-盘摩擦磨损试验机评价了2种薄膜的摩擦学性能;采用扫描电子显微镜观察和分析了薄膜磨斑表面形貌及其元素面分布.结果表明:采用FCAP技术制备的薄膜表面光滑、缺陷少、普遍具有明显的(111)面择优取向;而采用MAIP技术制备的薄膜表面存在较多大小不一的颗粒和孔洞,且无明显取向.在较低载荷下,采用FCAP薄膜表现出较好的抗磨性能,其磨斑表面存在沉积的TiN磨屑;而采用MAIP制备的薄膜磨斑表面无转移沉积磨屑,摩擦系数较高.Two kinds of TiN films were prepared on CrNi18Ti9 stainless steel substrate using filtered cathodic arc plasma (FCAP) apparatus equipped with an in-plane S filter and multi-arc ion-plating (MAIP) equipment, respectively, under the same deposition parameters. The friction and wear behaviors of the resulting TiN films under dry sliding against SAE52100 steel in a ball-on-disc configuration were evaluated on a UMT-2M test rig. The worn surface morphologies of the films and the counterpart steel balls were observed using a scanning electron microscope, while the elemental distributions of Fe and Ti on the worn surfaces of the counterpart steel balls were determined by means of energy dispersive spectroscopy. It was found that the TiN film prepared by FCAP technique was smooth and free of the defects such as voids and cracks, and it had obvious (111) preferential orientation. Contrary to the above, the TiN film prepared making use of the MAIP technique was relatively rough and had the defects including voids, and it had no texture. The TiN films prepared making use of different techniques showed different friction and wear behaviors as they slid against the steel counterpart. Specifically, the worn surface of the TiN film prepared by FCAP was much smoother than that of the film by MAIP, which conformed to the much better wear-resistance of the former than the latter as well. The differences in the friction and wear behaviors of the TiN films prepared by different techniques were related to their different transferring behavior onto the worn surface of the counterpart steel ball.

关 键 词：磁过滤等离子体沉积 多弧离子镀 氮化钛薄膜 摩擦学性能 

分 类 号：TG174.44[金属学及工艺—金属表面处理] TH117.3[金属学及工艺—金属学]