自组装半导体量子点在纳米电子器件中的应用  

Applications of Self-Assembled Semiconductor Quantum Dots in Nano-Electronic Devices

作　　者：孙捷[1] 

机构地区：[1]中国科学院半导体研究所半导体材料科学重点实验室,北京100083

出　　处：《半导体技术》2005年第1期61-65,共5页Semiconductor Technology

基　　金：国家重点基础研究发展规划项目(G2000068303;2002CB311905)

摘　　要：随着微电子工艺逐渐逼近其物理极限,具有量子特性的纳米电子器件的研制被提上日程。自组装半导体量子点由于缺陷少、生长技术成熟和具有δ函数形式的能态密度等优点而被广泛用于纳米电子器件制备中。本文按纵向输运器件、横向输运器件的分类扼要评述了该领域的最新进展,并对待解决的问题和发展前景作了分析。With micro-electronic techniques going towards their physical limits, the researches on nano-electronic devices with quantum effects are carried out. Self-assembled semiconductor quantum dots are widely used in fabrications of nano-electronic devices, since they have few defects, mature growth technology and electronic state density of 8 function. Here in the order of vertical transport devices and lateral transport devices, we provide a brief introduction of recent advances in that sphere and an analysis of problems and perspectives.

关 键 词：微电子工艺 量子特性 自组装半导体量子点 纳米电子器件 

分 类 号：TN304.01[电子电信—物理电子学]