采用粉末溅射的薄膜型气敏元件与测试特性  

Thin Film Gas Sensor and Test Characteristics

作　　者：邢建平[1] 蔡成森[1] 滕丽丽[1] 袁庆华[2] 裘南畹[2] 

机构地区：[1]山东大学信息科学与工程学院,山东济南250100 [2]山东大学物理与微电子学院,山东济南250100

出　　处：《电子元件与材料》2004年第12期47-50,共4页Electronic Components And Materials

摘　　要：利用粉末溅射,研究了SnO2/CeO2微型平面薄膜.结果表明:薄膜最佳掺杂范围(5%-20%)、最佳灵敏度膜厚(150 nm)、响应时间与恢复时间随膜厚变化遵循次方定律;制备出稳定性好的气敏元件,灵敏度S为20-80,对航空汽油气选择性Sl为8-20,响应时间τs<10 s,恢复时间τc<15 s.并对影响灵敏度测试的条件,例如测试电压、湿度影响、反应温变等进行了分析.The SnO2/CeO2 thin film was prepared by powder sputter method. Of the thin film, optimal doping range was 5%~20%, film thickness of optimum sensitivity 150 nm. The gas sensor with good stability was obtained by means of this film. Of the sensor, sensitivity was 20~80, selectivity 8~20 for petrol gas, response time below 10 s, recovery time below 15 s. Effects of test conditions on the sensitivity were analysed. Test voltage, humidity, and temperature change of reaction were included in the test conditions.

关 键 词：电子技术 粉末溅射 薄膜 气敏元件 测试特性 

分 类 号：TN305.94[电子电信—物理电子学]