用激光微细熔覆法直写电阻浆料制备厚膜电阻  

Fabrication of thick film resistors by laser micro-cladding resistor pastes

作　　者：李文兵[1] 李祥友[1] 曾晓雁[1] 

机构地区：[1]华中科技大学激光技术国家重点实验室,湖北武汉430074

出　　处：《功能材料》2005年第1期80-82,共3页Journal of Functional Materials

基　　金：国家高新技术研究发展计划(863计划)资助项目(2001AA421290);国家自然基金项目资助(50075030)

摘　　要：介绍了一种激光微细熔覆法直写电阻浆料制备厚膜电阻的新技术,并利用该技术在陶瓷基板上制备出厚膜电阻。文章中展示了部分实验结果,并分析了其附着机理。由于激光微细熔覆直写电阻技术具有无需掩模、图形由计算机控制、分辨率高、柔性化制造程度高等优点,显示该技术在电子工业中将具有广阔的应用前景。In this paper, a new technique to fabricate thick-film resistors by laser micro-cladding resistor pastes was reported. Using the new technique resistors were fabricated on ceramic substrate. Part of results was exhibited. Especially, the mechanisms of resistors formation were expounded. Some outstanding advantages such as no masks, with high-resolution line widths, with computer-controlled patterns and with strong flexibility have shown the great applications prospect in the electronic industry.

关 键 词：厚膜电阻 激光微细熔覆 激光直写 陶瓷基板 

分 类 号：TN452[电子电信—微电子学与固体电子学]