自适应光学系统MEMS微变形镜的研究  

Research of Micro Deformable Mirror Based MEMS Technology

作　　者：饶伏波[1] 乔大勇[1] 苑伟政[1] 

机构地区：[1]西北工业大学微/纳米系统实验室,西安710072

出　　处：《纳米技术与精密工程》2004年第4期288-293,共6页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金重大专项资助项目(90407020).

摘　　要：指出了传统变形镜研究所面临的瓶颈,以及采用MEMS技术研究微变形镜的优点.介绍了利用静电力驱 的平板电容式分立式微变形镜.分析结果表明它具有比传统变形镜更优越的性能.指出了进一步研究与发展MEMS微变形镜还需要解决的若干重要问题.This paper points out the bott le neck the research of traditional deformable mirror faced and lists some advantag es of micro deformable mirror based MEMS technology. Then the research of micro segmented deformable mirror driven by electrostatics is introduced. Results ind icate that it has more ascendant performance than traditional deformable mirror. At last, this paper points out several important problems need to be solved in order to improve MEMS micro deformable mirror.

关 键 词：MEMS技术 自适应光学系统 驱动 分立式 电容式 优点 性能 瓶颈 研究所 

分 类 号：TN256[电子电信—物理电子学]