近红外光学膜厚监控系统的研制  

Near Infrared Monitoring System for Optical Coating

作　　者：江绍基[1] 马云飞[1] 佘卫龙[1] 王自鑫[1] 朱析[1] 蔡志岗[1] 李宝军[1] 

机构地区：[1]中山大学光电材料与技术国家重点实验室,广东广州510275

出　　处：《半导体光电》2004年第6期469-473,共5页Semiconductor Optoelectronics

基　　金：国家"863"计划资助项目 (2 0 0 3AA3 1 1 0 2 2 ) ;国家"973"计划资助项目 (2 0 0 3CB3 1 490 1 )

摘　　要：　在光学真空镀膜膜厚监控过程中,近红外波段信号弱、外界干扰大、信噪比低,难于检测监控。运用相干检测、锁相放大原理,在光学真空镀膜机可见光波段监控系统的基础上,研制了锁相放大器和改装近红外探头组成的近红外光学膜厚监控系统,成功实现近红外膜厚监控信号的压噪、放大、滤波和检测监控。To amplify, filter and monitor weak near infrared signal from strong noise during optical coating, a lock-in amplifier with near infrared detector has been designed based on the principle of visible monitoring system for optical coating. By using the designed lock-in amplifier, the weak near infrared signal can be monitored successfully from the strong noise during optical coating, and the characteristics of the weak near infrared signal were easily decided.

关 键 词：近红外 光学薄膜 膜厚监控 锁相放大 

分 类 号：TH744[机械工程—光学工程]