基于MEMS的光力学红外成像  

MEMS Based Optomechanical Infrared Imaging

作　　者：潘亮[1] 张青川[1] 伍小平[1] 段志辉[1] 陈大鹏[2] 王玮冰[2] 郭哲颖[1] 

机构地区：[1]中国科学技术大学 [2]中科院微电子研究所,北京100029

出　　处：《实验力学》2004年第4期403-407,共5页Journal of Experimental Mechanics

基　　金：国家自然科学基金项目 (5 0 0 76 0 40和 1 0 2 32 0 30 )资助

摘　　要：非制冷红外成像仪以其优良的性价比和高可靠性而倍受关注。近期 ,非制冷的热机械型红外成像仪有望发展成为新的低价格高性能的红外成像设备。本文提出了一种新型光学读出的红外探测仪。此红外探测仪的核心器件焦平面阵列 (FPA)由无硅基底结构的微悬臂梁阵列构成。每个微悬臂梁独立地把入射的红外热辐射转化为被光学系统探测的热变形。它不需要读出电路、真空腔和制冷装置 ,其理论上的噪声等效温度差接近致冷型红外成像系统 ,而制作成本和难度将大幅降低。制作的无硅基底单层膜结构的FPA ,其单元尺寸为 2 0 0 μm× 1 0 0 μm ,阵列大小为 1 5 0× 1 0 0像素数。实验制作的系统探测到温度为 5 0 0K左右的热物体像 ,热像采样频率为 1 2幅 /秒。IR imaging using uncooled IR camera has received intensive interests because of its advantages of cost, weight, and reliability over cooled electro-optic camera. Recently, uncooled thermo-mechanical IR camera has been developed into a potential low-cost and yet high-resolution instrument for various applications. In this paper, a new type IR detector with an optical readout system is developed. The IR detector contains a focus plane array (FPA) which is fabricated into an array of bi-material microcantilevers in the form of single-layer membranous structure without Si-base. Each of the bi-material microcantilevers on the FPA independently converts the incident IR flux into the optical readable thermal-mechanical deformation. It doesn′t require integrated circuit, vacuum chamber and cryogenic cooler while promises to get high sensitivity and approach its cooled counterpart. So the cost and fabrication difficulty would be greatly decreased. The fabricated FPA is a single-layer membranous structure without Si-base with 150×100 pixels (cantilevers), and the cantilever size is 200μm×100×2μm. A thermal image of about 500K has been obtained with the assembled IR detector system with sampling rate of 12 frames per second.

关 键 词：非制冷 微悬臂梁 红外探测仪 像素数 红外成像系统 读出电路 光力学 FPA 近期 左右 

分 类 号：O484.1[理学—固体物理] TN215[理学—物理]