钛离子注入类金刚石碳膜的结构与性能的研究  

The study of performances and structures of Ti doped DLC films

作　　者：柳翠[1] 苟伟[1] 牟宗信[1] 李国卿[1] 

机构地区：[1]大连理工大学三束材料改性国家重点实验室,辽宁大连116024

出　　处：《功能材料》2005年第2期301-303,共3页Journal of Functional Materials

基　　金：国家高技术研究发展计划(863计划)资助项目(2001AA338010)

摘　　要：使用金属离子注入的方法制备了 Ti掺杂的DLC膜。采用原子力显微镜观察了薄膜的表面形貌,Ti掺杂后 DLC 膜的表面粗糙度明显减小,表面光洁度增加,颗粒细化。拉曼光谱分析表明实验获得的薄膜是典型的DLC膜,掺杂Ti后的 DLC膜的拉曼光谱存在明显的肩峰,DLC膜化学结构中的sp2 组分增加,sp3 组分减少。透射电子显微镜分析表明Ti注入后有TiC纳米晶形成。掺入Ti的 DLC膜的硬度从 14GPa增加到 20GPa。Ti 掺杂后的 DLC 膜的摩擦系数(0.15)明显低于未掺杂的DLC膜的摩擦系数(0.21),Ti离子注入有助于提高薄膜的抗磨损性。Ti ion was implanted into Diamond-like carbon (DLC) films synthesized by magnetron sputtering method. After ion implantation, the chemical bonds were detected by Raman spectroscopy and Transmission Electron Microscope (TEM), the surface morphology of the films was observed by atom force microscope (AFM), the friction coefficient was measured by a ball-on-disk microtribometer. Raman spectra confirm the DLC characteristics of the films and the content of sp^2 bonds increases after Ti ion implantation. In the TEM analysis, TiC nanocrystals are formed in the surface of the film. AFM results show the films are smooth and uniform with the surface roughness as low as 0.6nm. The hardness of Ti doped DLC film increases from 14GPa to 20GPa. The friction coefficient of the film reduces to 0.15 by Ti^+ implantation. The wear resistance of DLC film was improved after Ti^+ ion implanted into DLC film.

关 键 词：无机非金属材料 类金刚石碳膜 金属离子注入 钛掺杂 

分 类 号：TB332[一般工业技术—材料科学与工程] O484[理学—固体物理]