抓住机遇发展SOI技术  

An Overview of the Development of SOI Technologies

作　　者：夏立生 

机构地区：[1]华晶公司中央研究所,前24所分所江苏无锡214035

出　　处：《微电子学》1993年第2期8-14,共7页Microelectronics

摘　　要：综述了国内外SOI技术的发展状态,探讨了在我国发展SOI技术所面临的问题和解决途径。The state-of-the-art of SOI technologies around the world is described in the paper. Also examined are the difficulties and problems associated with the development of SOI technologies in our country and solutions are presented.

关 键 词：SOI SOS 绝缘体上硅 集成电路 

分 类 号：TN304.054[电子电信—物理电子学]