电子能量损失谱在类金刚石碳膜结构表征中的应用  

APPLICATION OF ELECTRON-ENERGY LOSS SPECTROSCOPY IN CHARACTERIZING DIAMOND-LIKE CARBON FILMS

作　　者：王维洁[1] 才勇[1] 王天民[1] 

机构地区：[1]兰州大学材料科学系,730001

出　　处：《微细加工技术》1993年第4期13-22,共10页Microfabrication Technology

摘　　要：本文先介绍了类金刚石碳膜的结构特点及电子能量损失谱的原理和分类;然后着重评述了近年来电子能量损失谱在类金刚石碳膜(及有些金刚石膜)结构表征中的应用;同时也讨论了类金刚石碳膜经某些后处理后其能量损失谱的变化特征。The structure characteristics of diamond-like carbon (DLC) films, the principle and classification of electron-energy loss spectroscopy (EELS) are firstly introduced. The application of EELS in characterizing the DLC films (and some diamond films) in recent years are then reviewed. The varying features of EELS of DLC-films after certain post-treatments are also discussed.

关 键 词：电子能量损失谱 类金刚石碳膜 结构表征 

分 类 号：TN304.18[电子电信—物理电子学]