光电集成加速度计中声光波导相位调制器的研究  

Study of the Waveguide Phase Modulator of the Photo-Electronic Integrated Accelerator Driven by a SAW

作　　者：钟娟娟[1] 陈才和[1] 张燕君[1] 吴波[1] 崔宇明[1] 丁桂兰[1] 

机构地区：[1]天津大学精密仪器与光电子工程学院,光电信息技术科学教育部重点实验室,天津300072

出　　处：《传感技术学报》2004年第4期651-654,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助项目 (40 2 74 0 4 7)

摘　　要：提出一种新型声光波导相位调制技术 ,用于光电集成M -Z光波导干涉型加速度计的信号调制。相位调制器工作在溅射有K8缓冲层的硅基底上 ,工作波长为 1 3μm。主要对声光调制器的特性参数进行了理论分析和优化设计 ,结果为 :氧化锌薄膜尺寸 5× 0 8× 0 0 0 3mm ,叉指换能器叉指对数N =17,中心距l=2 7 19μm ,中心频率f0=4 8MHz,中心指长L0 =4 4 6mm。A kind of novel optic waveguide phase modulator driven by a surface acoustic wave(SAW),applied to the signal modulation of photo electronic integrated accelerator based on Mach Zehnder interferometry, is present. The modulator deposited on K 8/Si substrate is made on the reference arm of M Z interferometer, and the wavelength is 1 3μm. The characteristic parameter of the acoustooptic modulator is analyzed theoretically and designed concretely, and the particular parameter is presented through by the calculation. The main design parameters of the modulator is as following: the ZnO thin film with the dimensions of 5 mm×0 8 mm×0 003 mm interdigital transducer with the fingers of 17 pairs, the SAW frequence of f 0=48 MHz, the electrode aperture width of l 0=4 46 mm and interdigital period l=27 19 μm.

关 键 词：光波导 声光调制 声表面波(SAW) 相位调制 叉指换能器 氧化锌薄膜 

分 类 号：TN818[电子电信—信息与通信工程]