同步辐射单色器冷却压弯机构  

Monochromator cooling bender in synchrotron radiation

作　　者：柳晖[1] 高雪官[2] 

机构地区：[1]上海师范大学机械与电子信息工程学院,上海201418 [2]上海交通大学机械与动力工程学院,上海200030

出　　处：《光学精密工程》2004年第6期608-613,共6页Optics and Precision Engineering

摘　　要：研究了带有柔性铰链组合体的冷却压弯机构,以用于减少晶体的热变形。给出了晶体热变形的种类及其机理,以及冷却压弯机构的受力分析及机构结构。运用有限元方法对这种机构进行了分析。结果表明:此种机构大大降低了第一晶体的热变形,在承受5N/mm2峰值功率密度条件下,面型误差仅为0.04μrad 3μrad,远远小于同步辐射光束线设计要求。结果还表明:此种机构尤其适用于高热载情况,是解决第三代同步辐射光源关键技术。The cooling bender with a flexural hinge-based framework is researched to reduce the crystal thermal distortion. The types and their principles of the crystal thermal distortion are introduced, and the mechanical forces and cooling bender structure are analyzed with the finite element method. The results show that the bender can greatly cut down the thermal distortion of the first crystal, the crystal surface error is only 0.04 μrad3 μrad at the peak power density of 5 N/mm^2, which is much lower than the design requirement to the beam line in synchrotron radiation. Such kind of bender especially fits in high-heat load, and it is one of the key techniques to solve the problems in developing the third generation of synchrotron radiation light source.

关 键 词：同步辐射 柔性铰链 压弯机构 双晶单色器 

分 类 号：O432.1[机械工程—光学工程]