利用纳米测量机实现大范围的计量型原子力显微镜  

Realization of a Large Range Metrological AFM using NMM

作　　者：郭彤[1] 傅星[1] 陈津平[1] 胡晓东[1] 胡小唐[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《计量学报》2005年第1期1-4,共4页Acta Metrologica Sinica

基　　金：国家863计划(2002AA404090);国家自然科学基金(60372006)

摘　　要：利用纳米测量机(NMM)和原子力显微镜(AFM)实现了大范围的计量型AFM,测量范围可以达到25mmⅹ25mmⅹ5mm,分辨力为0.1nm。纳米测量机扩展了普通AFM测头的测量范围,减小了压电扫描器固有特性的影响。运动全范围内的自适应误差补偿通过5个自由度的闭环操作得以实现。系统的高精度是通过3个微型激光干涉仪的零阿贝误差设置,一个表面传感AFM测头以及两个角度传感器实现。系统具有4种工作模式,其中第4种为最佳工作模式。实验结果表明系统具有高精度和大范围的特点。A large range metrological atomic force microscope (AFM) is realized using a nano-measuring machine (NMM) and an AFM head. The measuring range of this system is up to 25 mm × 25 mm × 5 mm with a resolution of 0.1 nm. The NMM expands the measuring range of a common AFM head, and minimizes the influence of piezo-scanner characteristics. An adaptive error compensation in the full range of motion is achieved by close-loop operation with five degrees of freedom. The high accuracy is obtained by a zero Abbe offset arrangement with three plane mirror miniature interferometers, a surface-sensing probe and two angular sensors. The system has four operating modes, and the fourth mode is the best one. The experimental results show its high accuracy and large measuring range.

关 键 词：计量学 纳米测量机 计量型原子力显微镜 激光干涉仪 大范围测量 

分 类 号：TB92[一般工业技术—计量学]