显微激光拉曼光谱法鉴别SiC晶体的多型体结构  

Polytype Identification of SiC Crystals by Micro-Raman Spectroscopy

作　　者：韩荣江[1] 王继扬[1] 徐现刚[1] 胡小波[1] 董捷[1] 李现祥[1] 李娟[1] 姜守振[1] 王丽[1] 蒋民华[1] 

机构地区：[1]山东大学晶体材料国家重点实验室

出　　处：《人工晶体学报》2004年第6期877-881,共5页Journal of Synthetic Crystals

基　　金：国家 8 6 3计划 (No .2 0 0 1AA31 1 0 80 );国家自然科学基金 (No .6 0 0 2 5 40 9)资助项目

摘　　要：利用显微激光拉曼光谱法对掺氮 6H SiC单晶中的寄生多型体进行了鉴别 ,结果表明其中有 4H SiC和 15R SiC两种寄生多型体。不同SiC多型体的纵光学声子与等离子体激元的耦合模 (LOPC模 )表明 :在掺氮 6H SiC单晶的生长条件下 ,6H SiC的掺氮效应与 4H SiC存在明显差别 ,而与 1 5RThe parasitic polytypes in nitrogen-doped 6H-SiC single crystal were identified by Micro-Raman spectroscopy. The results show that there are two parasitic polytypes such as 4H-SiC and 15R-SiC in 6H-SiC crystal. The longitudinal optical phonon-plasma coupled modes (LOPC modes) of different SiC polytypes show that the nitrogen-doped effect of 6H-SiC is markedly different from that of 4H-SiC, and is similar to that of 15R-SiC under the growth condition of nitrogen-doped 6H-SiC single crystal.

关 键 词：掺氮 6H-SIC 4H-SiC 耦合模 SIC晶体 单晶 等离子体 型体 声子 激光拉曼光谱 

分 类 号：O651[理学—分析化学] TN304.12[理学—化学]