一种基于多端口组件网络的MEMS系统级建模方法  

A System Level Modeling Method of MEMS Using Multi-Port-Component Network

作　　者：霍鹏飞[1] 马炳和[1] 苑伟政[1] 

机构地区：[1]西北工业大学微/纳米系统实验室,西安710072

出　　处：《机械科学与技术》2005年第2期192-194,198,共4页Mechanical Science and Technology for Aerospace Engineering

基　　金：国家自然科学基金项目(50205022);863/MEMS重大专项项目(2003AA414017);西北工业大学"英才培养计划"基金项目资助

摘　　要：以多端口组件及其网络的研究作为理论基础,创建了专门针对MEMS的系统级建模方法———用单个组件 表示MEMS的各功能结构部件,组件的端口表征与部件有关的各种物理量,依据一定规则联结组件形成的网络表 征整个微系统。该方法采用常微分和代数方程描述组件的行为,混合信号硬件描述语言作为组件及其网络的建模 语言。以梁为例,阐述了如何建立其行为方程,以得到参数化、可供重用的组件模型。上述研究结合微加速度计的 系统级设计应用实例,表明该方法是实现MEMS系统级建模的有效手段,能针对MEMS固有的多能量域耦合行为 等进行快速建模与仿真。A new system level modeling method of MEMS is created. With this method each functional component of MEMS is modeled as a multi-port-component, using its ports to describe various physical variables involved. Then multi-port-components connect together to form a network to represent the whole system of MEMS. The behavior of multi-port-component (functional component) is described with DAEs (differential and algebraic equations), coded by analogy hardware description language. As a demonstration the behavior equations of a typical MEMS functional component, spatial beam, is extracted by analytical approach, then its parameterized schematic-drive multi-port-component is established. By means of a case study of system level design of a micro accelerometer the validity and efficiency to accomplish system level mixed-domain simulation with this method is demonstrated.

关 键 词：多端口组件网络 系统级建模 MEMS 硬件描述语言 

分 类 号：TH7[机械工程—仪器科学与技术]