静电活塞式驱动的分立式微镜的快速仿真(英文)  

Rapid Simulation of Electrostatically Piston Actuated Segment Micromirror

作　　者：饶伏波[1] 乔大勇[1] 苑伟政[1] 姜澄宇[1] 

机构地区：[1]西北工业大学微/纳米系统实验室,西安710072

出　　处：《微纳电子技术》2005年第2期78-82,共5页Micronanoelectronic Technology

基　　金：ThisworkwassponsoredbytheNationalNaturalScienceFondationofChina(90407020)

摘　　要：用解析的方法对典型的基于SUMMIT工艺、静电活塞式驱动的分立式微镜进行了快速的静态与动态仿真,避免了有限元法的繁琐性。在微镜阵列变形时的孔径函数不能用解析表达式表示的情况下,应用MATLAB软件实现了快速傅里叶变换,得到了单色平面波经微镜阵列反射后的的远场衍射花样。Static and dynamic simulations of a typical electrostatically piston actuated micromirror fabricated by SUMMIT foundry are performed rapidly with the application of a set of analytical expressions to avoid heavy finite element analysis. Though the aperture function of the deflected micromirror array can not be described by analytical expression,but fast Fourier transfrom is easily performed using MATLAB to get the farfield diffraction pattern of monochromatic plane wave reflected off the micromirror array.

关 键 词：MEMS 微镜 仿真 相位调制 

分 类 号：TH703[机械工程—仪器科学与技术]