溅射设备真空系统故障与诊断  

Accident and Diagnosis of Splash Equipment Vacuum system

作　　者：谢其中[1] 谢长生[1] 王立环[1] 

机构地区：[1]华中理工大学,武汉市430074

出　　处：《真空》1993年第3期35-38,10,共5页Vacuum

摘　　要：本文介绍了应用真空溅射方法形成膜层，设备真空系统常见故障诊断及排除。This paper has introduced the method of formative membranous layer, apply vacuum,splash.It has also introduced. the diagnosis commonly happened accident in equipments of vacuum system and overcome it.

关 键 词：溅射 真空系统 故障 诊断 镀膜 

分 类 号：TN305.8[电子电信—物理电子学]