扫描隧道显微镜针尖制备及其影响因素的研究  

THE PREPARATION OF TIPS FOR SCANNING TUNNELING MICROSCOPE AND STUDIES ON ITS EFFECTIVE FACTORS

作　　者：郭仪[1] 白春礼[1] 

机构地区：[1]中国科学院化学研究所,北京100080

出　　处：《真空科学与技术》1993年第1期56-64,共9页Vacuum Science and Technology

摘　　要：介绍一种扫描隧道显微镜针尖的直流腐蚀电路。电路中使用了MOS场效应管和快速比较器,使电解池切断时间达500ns。同时对影响针尖形状和尖度的各种因素进行了实验研究,并分析其电化学机理。文章也对交流腐蚀铂铱针尖进行了探讨。In this paper, a set of electrocircuits were established for DC electrochemical etching procedure to prepare STM tips. Fast MOSFET transistors and high-speed comparators were adopted in the etching circuits resulting in a minimum out-off time of 500ns. A series of experiments were performed to study all the parameters which influence the shape and sharpness of the tip, and the results were analysed by the electrochemical theory. In addition, some experiments of AC electrochemical etching method were also done to fabricate Platinum/Iridium tips for STM.

关 键 词：STM 针尖 分辨率 腐蚀 

分 类 号：TN16[电子电信—物理电子学]