用动态全积分法提高圆分度精度  

An Improvement of Circle Graduation Accuracy with the Dynamic Perfect Integration Method

作　　者：叶大华[1] 叶盛祥[1] 

机构地区：[1]中国科学院光电技术研究所

出　　处：《光电工程》1994年第2期27-33,共7页Opto-Electronic Engineering

摘　　要：论述了动态全积分法的基本原理和误差分析，比较了几种基本结构和信号处理方法的优缺点，对实现方法的关键技术进行了讨论。组合装配成原理实验装置，并作了三个对比实验，取得了较好的初步结果。实验表明动态全积分法能很好地消除光栅刻划误差及偏心的影响，提高了圆分度精度。此法适用于高精度测量系统。The basic principle of the Dynamic Perfect Integration Method(DPIM) has been described in the paper. The error analysis has also been carried out. A few basic structures and signal processing techniques have been analysed. The advantages and disadvantages of the signal processing techniques have been reviewed. With the experimental setup, three comparing experiments have been carried out. All these experiments show that the DPIM can improve the circle graduation accuracy because it can eliminate the effects of the graduation errors and eccentricity of the master grating, so the method is suitable to high accuracy measuring systems.

关 键 词：光栅刻划 圆光栅 编码度盘 积分法 

分 类 号：TH741.6[机械工程—光学工程]