IC加工及检测装备超精密工作台自标定技术研究  

Research on Self-calibration of Ultra-precision Stages Appliedin IC Fabrication and Inspection Devices

作　　者：朱煜[1] 朱立伟[1] 尹文生[1] 段广洪[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《电子工业专用设备》2005年第3期20-24,共5页Equipment for Electronic Products Manufacturing

基　　金：国家重点基础研究发展计划支持项目穴2003cb716204雪

摘　　要：在对超精密工作台自标定相关文献综述的基础上,基于刚体运动方程和非线性最优化方法,提出了一种超精密工作台自标定算法。仿真结果表明:该算法可以实现超精密工作台的标定,并且其最终标定精度与辅助测量装置精度无关,只受自标定过程中随机测量噪声的影响。Based on the introduction of the stage self-calibration literatures-and according to the rigid motion equations and the non-linear optimization method-this paper provides an algorithm for self-calibration of the ultra-precision stages. Simulation results show that the proposed algorithm can realize the calibration and the calibration accuracy is free from artifact imperfection and only affected by random measurement errors encountered during the process of calibration.

关 键 词：超精密 工作台 自标定 

分 类 号：TH161.5[机械工程—机械制造及自动化]