一种基于深冷混合工质节流制冷机的高真空水汽捕集器  

A NEW CRYOGENIC WATER-TRAP FOR HIGH VACUUM APPLICATIONS BASED ON A RECUPERATIVE MIXTURE REFRIGERATOR

作　　者：公茂琼[1] 吴剑峰[1] 胡勤国[1] 

机构地区：[1]中国科学院理化技术研究所,北京100080

出　　处：《真空与低温》2004年第4期193-197,共5页Vacuum and Cryogenics

基　　金：国家自然科学基金资助(50206024)。

摘　　要：详细介绍了一种新型的高真空深冷水汽捕集器。该深冷水汽捕集器采用单压缩机驱动的混合工质节流制冷机冷却,制冷系统采用商用单级油润滑压缩机驱动,在配套600L涡轮分子泵时,压缩机的额定输入功率450W,捕集器表面温度最低为110K。在相同真空测试条件下,开启低温捕集器可使系统极限真空度和抽速均提高一个数量级。该新型深冷捕集器具有优异的性能、低廉的造价及高可靠性等特点,与其他高真空获得设备如涡轮分子泵结合可成为一种优异的洁净高真空获得系统。The details of a new cryogenic water-trap for high vacuum applications based on a recuperative mixed-refrigerant refrigerator were disclosed. While used with a molecular turbo vacuum pump of 600 L/s pumping speed, the cryogenic water-vapor trap was driven by an oil-lubricated single-stage compressor with nominal input power of 450 W. The lowest temperature is 110 K. A comparison was made between a vacuum system with and without the cryogenic water-trap. The results show that the pumping down time of which with the cryogenic water-trap can be reduced greatly as ten times. This will be important for most vacuum systems, e.g. vacuum deposition system, semiconductor industry, etc. Compared with the traditional cryogenic pump, there is no requirement of periodic maintenance. Moreover, the new developed cryogenic water-trap has high reliability, low cost, and easy to be built in large scale based on numerous merits of mixed-refrigerant refrigeration system.

关 键 词：高真空 涡轮分子泵 节流制冷机 混合工质 抽速 极限真空度 真空测试 捕集器 新型 冷混 

分 类 号：O4-4[理学—物理] TB752[一般工业技术—真空技术]