组合式微夹持器控制系统的研制  

Research on Control System of Combined Micro-gripper

作　　者：陈立国[1] 荣伟彬[1] 孙立宁[1] 曲东升[1] 

机构地区：[1]哈尔滨工业大学机器人研究所,黑龙江哈尔滨150001

出　　处：《压电与声光》2005年第2期105-108,共4页Piezoelectrics & Acoustooptics

基　　金：国家"八六三"MEMS重大专项资助项目(2002AA404450);国防基础科研项目

摘　　要：将微直线电机宏动机构与双晶片压电悬梁微动机构结合,研制高精度、大范围的组合式微夹持器。针对宏微结合的结构形式,设计组合式微夹持器宏微控制系统。采用仿人智能PI控制方法,提高了控制精度。测试实验表明,闭环控制系统取得较好效果。A combined micro-gripper with high resolution and large working space is developed which integrates the linear micro motor and bimorph cantilever structure. The control system is designed according to the integrated structure.An intellectual PI control algorithm was applied to the position control of the bimorph cantilever to obtain high performance. The test experiments show that the closed loop control model was effective.

关 键 词：微操作 微夹持器 双晶片压电悬梁 微直线电机 

分 类 号：TP24[自动化与计算机技术—检测技术与自动化装置]