原子力显微镜中微悬臂梁/探针横向力的标定  

Lateral Force Calibration of Micro-Cantilever/Tip in Atomic Force Microscopy

作　　者：鲍海飞[1] 李昕欣[1] 王跃林[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050

出　　处：《测试技术学报》2005年第1期4-10,共7页Journal of Test and Measurement Technology

基　　金：国家973重大基础研究资助项目(G1999033101);国家863计划资助项目(2004AA404045)

摘　　要：　利用微加工制造的微悬臂梁/探针尖已经广泛应用在微观表面性质测试和微纳米尺度加工等领域,成为微纳米研究领域中不可缺少的重要工具.为了能够定量研究原子力显微镜中探针与表面的相互作用力,需要对微悬臂梁/探针的力学性能进行表征.本文简要地论述了原子力显微镜中微悬臂梁的形变光反射原理和探针与表面的接触刚度理论,阐明了微悬臂梁横向力标定的重要性,综述了目前几种微悬臂梁/探针横向力的标定方法、简单的推倒过程和特点.Micro-cantilever/tip prepared in microelectromechanical system(MEMS) has been widely used in many fields, such as the study of surface properties and the application in micro/nano machining, and it becomes an important and indispensable to the micro/nano science and technology. In order to obtain the mechanical properties in quantity, the micro-cantilever/tip should be calibrated before its use. the basic micro-cantilever deflection theory of atomic force microscopy(AFM) and the contact stiffness theory between the tip and the surface are described in brief. The derivation processes of different methods are simply given, and the methods of lateral force calibration of micro-cantilever/tip are reviewed and discussed.

关 键 词：原子力显微镜 微悬臂梁 横向力 探针 相互作用力 纳米尺度 表面性质 加工制造 定量研究 研究领域 标定方法 反射原理 力学性能 度理论 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH742[自动化与计算机技术—控制科学与工程]