卷绕式真空镀膜机的膜长计数装置  

Film length counting devices of coiled vacuum coating machine

作　　者：干蜀毅[1] 陈立仁[1] 周永安[1] 程义然[1] 彭良清[1] 金立山 

机构地区：[1]合肥工业大学真空教研室

出　　处：《真空与低温》1994年第3期133-134,共2页Vacuum and Cryogenics

摘　　要：卷绕式真空镀膜机的膜长计数装置干蜀毅，陈立仁，周永安，程义然，彭良清，金立山（合肥工业大学真空教研室）Ｆｉｌｍｌｅｎｇｔｈｃｏｕｎｔｉｎｇｄｅｖｉｃｅｓｏｆｃｏｉｌｅｄｖａｃｕｕｍｃｏａｔｉｎｇｍａｃｈｉｎｅ￥ＧａｎＳｈｕｙｉ；ＣｈｅｎＬｉｒｅｎ；Ｚ...The structures of several kinds of film length counting devices of coiled vacuum coating machine and the counting principle have been presented.Their features and aplications have been analyzed and summarized.

关 键 词：卷绕式镀膜机 膜长计数 镀膜机 

分 类 号：TN305.8[电子电信—物理电子学]