17.1 nm波段光电成像系统分辨率的实验研究  

Experimental study of the resolution of an optoelectronic imaging system at 17.1 nm based on MCP detector

作　　者：薛玲玲[1] 陈波[2] 尼启良[2] 张华[1] 曹轲[1] 张玲[1] 

机构地区：[1]长春理工大学理学院,吉林长春130022 [2]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033

出　　处：《光学精密工程》2005年第2期225-230,共6页Optics and Precision Engineering

基　　金：中国科学院长春光学精密机械与物理研究所创新基金支持

摘　　要：设计了17.1 nm波段光电成像系统,用于对波长为17.1 nm的极紫外光进行成像。该成像系统分为三大部分:光源、单色仪和探测系统。一个调Q的Nd∶YAG激光器(Continuum 9000)用来产生激光等离子体,掠入射单色仪由2块球面聚焦镜和1块600 L/mm的球面掠入射光栅组成,经单色仪分光后得到波长为17.1 nm的单色光,探测器是微通道板(MCP)和荧光屏组件共同组成,Kodak400 型胶卷被用于记录狭缝的像。结果获得了一宽度为3 mm的狭缝的像,实验测得130μm的成像系统的空间分辨率,好于相同条件下文献[6]的结果。An optoelectronic imaging system was designed to image EUV light at 17.1 nm. This imaging system is composed of three parts: light source, monochromator and detection system. A Q-modulated Nd-YAG laser (Continuum 9000) is used to produce laser plasma. The grazing monochromator consists of two spherical mirrors and a spherical grazing grating,by which monochromatic light at 17.1 nm is obtained and the detector is a MCP(Microchannel Plate) and phosphor screen assembly. Kodak 400 film is used to record the image of a 3 mm-width-slit obtained by this imaging system. Its spatial resolution of 130 μm is demonstrated in this paper,which is better than that of reference [6].

关 键 词：极紫外 激光等离子体 单色仪 微通道板 

分 类 号：TP751[自动化与计算机技术—检测技术与自动化装置]