键合界面阻抗对VCSEL的电、热学特性的影响  

Influence of Electrical Resistance of the Fused Interface on the Electrical and Thermal Characteristics of VCSELs

作　　者：侯识华[1] 赵鼎[2] 叶晓军[1] 孙永伟[1] 谭满清[1] 陈良惠[1] 

机构地区：[1]中国科学院半导体研究所,北京100083 [2]中国科学院电子学研究所,北京100080

出　　处：《光子学报》2005年第4期503-506,共4页Acta Photonica Sinica

基　　金：国家高技术研究发展计划资助课题(No.2001AA312180)

摘　　要：采用一电阻层来表征键合界面处的阻抗 通过求泊松方程、电流密度方程、载流子扩散方程以及有源层结压降方程自洽解的方法,计算了VCSEL的电势分布,进而求解热传导方程,得到VCSEL的温度分布 详细分析了键合界面阻抗对晶片键合结构垂直腔面发射激光器内部的电势分布、温度分布以及有源层中的注入电流密度、载流子浓度。The electrical resistance of the fused interface is simply characterized using a resistive layer, and the voltage distribution inside the vertical-cavity surface-emitting lasers (VCSELs) are calculated by using a method of finding self-consistent solutions for the Poisson's, injected current density, carrier diffusion, and voltage drop equations, and the temperature distribution inside the VCSELs are obtained subsequently by solving the thermal conduction equation. The influences of the electrical resistance of the fused interface on the distribution of voltage and temperature inside the single-fused VCSELs and the radial distribution of the injected current density, carrier density, voltage drop and temperature in the active layer are analyzed in detail.

关 键 词：垂直腔面发射激光器 晶片键合 键合界面阻抗 电学特性 热学特性 有限差分法 

分 类 号：TN248.4[电子电信—物理电子学]