多晶硅微机械零件的制作及测试  

Fabrication and Measurement of Polysilicon Micromechanisms

作　　者：杨岳[1] 周兆英[1] 叶雄英[1] 李勇[1] 

机构地区：[1]清华大学精密仪器与机械学系

出　　处：《中国机械工程》1994年第4期44-46,共3页China Mechanical Engineering

基　　金：国家自然科学基金

摘　　要：探讨利用硅表面微细加工工艺制造微型机械的方法，制作了徽涡轮、微传动齿轮、微螺旋弹簧和微凸轮传动机构等微机械结构，实现了齿轮的啮合传动、微弹簧扭转及微凸轮传动机构的运动。对多晶硅材料的机械物理性能，微机械系统动力学特性进行了测试分析。This paper describes the fabrication of planar polysilicon mechanisms. The mechanisms, including turbines, gears, springs and cam transmission mechanisms in micrometers,have been fabricated by surface microfabrication techniques,in which polysilicon is used as the structural material. The mechanisms were in motion successfully. Finally, mechanical characteristics of polysilicon and dynamic characteristics of micromechanical systems are measured and analysed.

关 键 词：微型机械 微加工 多晶硅 机械元件 

分 类 号：TH13[机械工程—机械制造及自动化]