纳米精度外差式激光干涉仪非线性误差修正方法研究  

A New Method to Correct the Nonlinear Errors in Heterodyne Interferometry

作　　者：黎永前[1] 李晓莹[1] 朱名铨[1] 

机构地区：[1]西北工业大学机电工程学院

出　　处：《仪器仪表学报》2005年第5期542-546,共5页Chinese Journal of Scientific Instrument

摘　　要：提出一种外差干涉非线性误差修正方法,采用混频技术将光频信号降低到通用数据采集系统频率响应范围内;采用高速数据采集板实现外差干涉测量信号和参考信号双通道同步实时采集;对采集数据进行光滑处理,滤除高阶非线性误差;解出位移量对应的相位差。试验结果表明,所提出的修正方法可以较好地修正双频激光干涉仪中存在的非线性误差,使外差干涉仪测量不确定度由原来的20nm降低到10nm。A new nonlinear-error correction-method for the heterodyne interferometer was proposed.The data are smoothened to filter the higher order nonlinear errors.The frequencies of both the measurement signals and the reference signals are lowened synchronously within the band of the data acquiring systems using the mixing-frequency technique,and the signals are acquired synchronously through double channels A/D boards,and then the phases to be measured are evaluated.The experimental setup is given.The experimental results illustrate that the proposed nonlinear-error-correction method can reduced the uncertainty in the heterodyne interferometer from 20nm to 10nm.

关 键 词：误差修正方法 外差式 双频激光干涉仪 非线性误差 精度 纳米 数据采集系统 测量不确定度 数据采集板 外差干涉仪 频率响应 混频技术 实时采集 参考信号 测量信号 光滑处理 采集数据 试验结果 双通道 相位差 位移量 

分 类 号：TH824.4[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]