基于C-V,I-V,Q-V特性的铁电电容新模型  

A New Model of Ferroelectric Capacitor Based on C-V,I-V,Q-V Characteristics

作　　者：陈小明[1] 汤庭鳌[1] 

机构地区：[1]复旦大学微电子学系ASIC和系统国家重点实验室,上海200433

出　　处：《Journal of Semiconductors》2005年第5期983-989,共7页半导体学报（英文版）

基　　金：国家自然科学基金;应用材料AM基金;国防科技预研和PDC基金资助项目~~

摘　　要：推导出描述铁电电容电气特性的新模型.铁电电容可以等效为开关电容(电畴电容)和非开关电容(普通线性电容)的并联,而电畴电容可以看作是由电偶极子组成的铁电材料、上电极和下电极组成.根据实验测试的铁电电容的C V特性,选定电偶极子矫顽电压的概率密度函数为t分布,从而推导出只用6 个参数描述的铁电电容的C- V,I -V和Q- V关系式,根据这些关系式仿真的结果与实验结果基本吻合.A new model is developed for describing the elect rical behavior of ferroelectric capacitors.By modeling the ferroelectric capacitor as a switching capacitor(dipole capacitor) in series with a non-switching capacitor(linear capacitor) and this dipole capacitor as a collection of dipoles with a top electrode and a bottom electrode,and by assuming the probability density functions of dipoles’ coercive voltages(positive and negative) as t-distribution according to experiment results of ferroelectric capacitors’ C-V characteristic,the C-V,I-V,and Q-V expressions of ferroelectric capacitors are derived,and these expressions are described with only six parameters.The simulated results from these expressions are quite fitted with experiment results.

关 键 词：铁电电容 模型 C-V特性 电偶极子 概率密度函数 

分 类 号：TM53[电气工程—电器]