一种电容式加速度传感器设计的研究  

Study of Capacitive Acceleration Transducer Design

作　　者：温淑慧[1] 

机构地区：[1]燕山大学电气工程学院,河北秦皇岛066004

出　　处：《传感技术学报》2005年第2期329-332,357,共5页Chinese Journal of Sensors and Actuators

摘　　要：设计了一种惯性式测振传感器,建立了差动电容式加速度传感器的数学模型,并对其作了特性分析,由给定的非线性误差可以求出质量块相对运动的最大量程。本设计具有电路结构简单,频率范围宽约为0～450HZ,线性度小于1%,灵敏度高,输出稳定,测量误差小等优点,并且通过实验验证了各项性能指标满足设计要求。The paper designs a inertial vibration sensors. The mathematic model of a differential capacitive acceleration sensor was built up and its characteristic analysis was discussed. The maximal measuring range of bulk masses relatively moving can be gained by non-linear error. The design has many excellences, such as simple circuit constitution, 0~450HZ frequency range, less than 1 percent linearity, high sensitive ability, stability output, little measuring error. Every capability index was examined by experiments and all satisfy the design requirements.

关 键 词：电容式加速度传感器 差动电容 非线性误差 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]