磷掺杂类金刚石薄膜的制备与性能研究  

Preparation and Properties of Phosphorus Doped Diamond-like Carbon Films

作　　者：王进[1] Sunny C.H.Kwok 陈俊英[1] 杨萍[1] 黄楠[1] P.K.Chu 

机构地区：[1]西南交通大学材料科学与工程学院,材料先进技术教育部重点实验室,成都610031 [2]香港城市大学物理与材料系

出　　处：《真空科学与技术学报》2005年第2期123-126,共4页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金(No.50203011和No.30270392)资助

摘　　要：应用等离子体浸没离子注入与沉积方法合成了磷掺杂的类金刚石(P doped diamond like carbon,P-aopea DLC)薄膜。结构分析表明磷以微米级岛状结构分散于DLC薄膜表层,P的掺杂增加了DLC薄膜的无序性,俄歇能谱证明岛型区域是由P、C、O三种元素形成的化合物,衰减全反射傅里叶红外光谱(ATR-FTIR)的分析结果显示存在P-O-P和P-P-C的非对称伸缩振动。掺杂表面表现出强烈的亲水性(水接触角为16.9°),体外血小板粘附实验结果显示,P掺杂DLC薄膜表面粘附的血小板少且变形小,表现出的血液相容性优于热解碳和未改性DLCo。P-doped DLC薄膜与水的界面张力为2.7 nJ/cm2,具有较理想的接近于血细胞的界面张力,因此与血液保持了较高的相容性。The phosphorus-doped diamond-like carbon (P-doped DLC) films are fabricated by plasma immersion ion implantation and deposition (PIII-D). Microstructure manifesting as dots are visible under atomic force micrographs disclose that these round and flat islands are distributed evenly on the film surface. Auger electron spectroscopy (AES) shows that they are composed of C, P and O while only C and O can be found in the areas away from the islands. The P-doped DLC film exhibits excellent wettability (16.9° water contact angle). In vitro platelet adhesion experiment is conducted to examine the blood compatibility. Studies of scanning electron microscopy (SEM) and optical microscopy reveal a significant decrease of the number as well as activation of platelets on the P-doped DLC film, compared to the undoped DLC film and low temperature isotropic carbon (LTIC).

关 键 词：类金刚石薄膜 磷掺杂 性能研究 等离子体浸没离子注入 DLC薄膜 diamond 制备 carbon 界面张力 衰减全反射 血小板粘附 血液相容性 沉积方法 like 俄歇能谱 元素形成 伸缩振动 分析结果 红外光谱 水接触角 薄膜表面 微米级 

分 类 号：TQ174.756[化学工程—陶瓷工业] TN304.18[化学工程—硅酸盐工业]