电容式微加工超声传感器(cMUT)的结构设计及仿真  

Structural Design and Simulation of Capacitive Microfabricated Ultrasonic Transducers

作　　者：宋光德[1] 刘娟[1] 栗大超[1] 

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072

出　　处：《纳米技术与精密工程》2005年第2期156-159,共4页Nanotechnology and Precision Engineering

摘　　要：与传统的压电传感器相比,电容式微加工超声传感器(cMUT)性能优良,有着广泛的应用前景.为此,介绍了cMUT的基本结构和工作原理,并提出了一种新型结构.利用有限元分析软件ANSYS对这种结构进行模态分析,得到其共振频率和一阶振动图;利用ANSYS的耦合场分析模块和参数化设计语言(APDL),对结构进行力电耦合仿真,获得其直流偏压和作为发射器时所需的交流电压值.分析结果表明,所设计的结构符合设计要求.Capacitive microfabricated ultrasonic transducer (cMUT) has superior performance to the traditional piezoelectric transducers and will be used in a wide variety of applications. In this paper the basic structure and operating principle of cMUT are reported, and a new kind of structure is presented. Then the new structure is simulated with modal analysis by finite element analysis software ANSYS, and the resonant frequency and the first vibration map are presented. Using coupling field of ANSYS and parameter design language (APDL), the structure is simulated with force electric coupling. The biased DC voltage and the AC excitation required by a transmitter are obtained. The results indicate the structure designed meets the design (principle. )

关 键 词：超声传感器 微加工 电容式 结构设计 仿真 有限元分析软件 ANSYS 压电传感器 工作原理 共振频率 模态分析 新型结构 设计语言 分析模块 力电耦合 分析结果 直流偏压 设计要求 本结构 参数化 耦合场 电压值 发射器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TG665[自动化与计算机技术—控制科学与工程]